7/7/2011	9:57:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/7/2011	9:57:49 AM	Recipe started at 9:57 AM
7/7/2011	9:57:49 AM	Helium valve closed
7/7/2011	9:57:49 AM	H2 valve closed
7/7/2011	9:57:49 AM	BCl3 valve closed
7/7/2011	9:57:49 AM	PH3 valve closed
7/7/2011	9:57:49 AM	SiCl4 pre valve closed
7/7/2011	9:57:49 AM	SiCl4 post valve closed
7/7/2011	9:57:49 AM	Main Vac valve closed
7/7/2011	9:57:49 AM	Bypass valve closed
7/7/2011	9:57:49 AM	Bubbler valve closed
7/7/2011	9:57:49 AM	Helium MFC set to  0.000000
7/7/2011	9:57:49 AM	H2 MFC set to  0.000000
7/7/2011	9:57:49 AM	BCl3 MFC set to  0.000000
7/7/2011	9:57:49 AM	PHl3 MFC set to  0.000000
7/7/2011	9:57:49 AM	SiCl4 MFC set to  0.000000
7/7/2011	9:57:49 AM	Bypass solenoid MFC set to  0.000000
7/7/2011	9:57:50 AM	Tube furnace set to 0
7/7/2011	9:57:50 AM	Run finished at 9:57 AM
7/7/2011	9:57:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/7/2011	9:58:48 AM	Helium MFC set to  500.000000
7/7/2011	9:58:51 AM	Helium valve opened
7/7/2011	9:59:13 AM	SiCl4 MFC set to  100.000000
7/7/2011	9:59:14 AM	SiCl4 pre valve opened
7/7/2011	10:01:28 AM	SiCl4 post valve opened
7/7/2011	10:01:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	10:01:38 AM	Recipe started at 10:01 AM
7/7/2011	10:01:38 AM	Helium valve closed
7/7/2011	10:01:38 AM	H2 valve closed
7/7/2011	10:01:38 AM	BCl3 valve closed
7/7/2011	10:01:38 AM	PH3 valve closed
7/7/2011	10:01:38 AM	SiCl4 pre valve closed
7/7/2011	10:01:38 AM	SiCl4 post valve closed
7/7/2011	10:01:38 AM	Main Vac valve closed
7/7/2011	10:01:38 AM	Bubbler valve closed
7/7/2011	10:01:38 AM	Bypass valve opened
7/7/2011	10:01:38 AM	Helium MFC set to  0.000000
7/7/2011	10:01:38 AM	H2 MFC set to  0.000000
7/7/2011	10:01:38 AM	BCl3 MFC set to  0.000000
7/7/2011	10:01:38 AM	PHl3 MFC set to  0.000000
7/7/2011	10:01:38 AM	SiCl4 MFC set to  0.000000
7/7/2011	10:01:38 AM	Bypass solenoid MFC set to  0.000000
7/7/2011	10:01:38 AM	Tube furnace set to 0
7/7/2011	10:01:55 AM	Run aborted at 10:01 AM
7/7/2011	10:01:55 AM	Helium valve closed
7/7/2011	10:01:55 AM	H2 valve closed
7/7/2011	10:01:55 AM	BCl3 valve closed
7/7/2011	10:01:55 AM	PH3 valve closed
7/7/2011	10:01:55 AM	SiCl4 pre valve closed
7/7/2011	10:01:55 AM	SiCl4 post valve closed
7/7/2011	10:01:55 AM	Bypass valve closed
7/7/2011	10:01:55 AM	Main Vac valve closed
7/7/2011	10:01:55 AM	Bubbler valve closed
7/7/2011	10:01:55 AM	Helium MFC set to  0.000000
7/7/2011	10:01:55 AM	H2 MFC set to  0.000000
7/7/2011	10:01:55 AM	BCl3 MFC set to  0.000000
7/7/2011	10:01:55 AM	PHl3 MFC set to  0.000000
7/7/2011	10:01:55 AM	SiCl4 MFC set to  0.000000
7/7/2011	10:01:56 AM	Tube furnace set to 0
7/7/2011	10:01:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	10:02:01 AM	Helium MFC set to  500.000000
7/7/2011	10:02:03 AM	Helium valve opened
7/7/2011	10:02:07 AM	SiCl4 MFC set to  100.000000
7/7/2011	10:02:08 AM	SiCl4 pre valve opened
7/7/2011	10:02:10 AM	SiCl4 post valve opened
7/7/2011	10:02:16 AM	Bypass valve opened
7/7/2011	10:04:36 AM	Bypass valve closed
7/7/2011	10:04:37 AM	Main Vac valve opened
7/7/2011	10:13:56 AM	Main Vac valve closed
7/7/2011	10:14:28 AM	Helium valve closed
7/7/2011	10:14:28 AM	H2 valve closed
7/7/2011	10:14:28 AM	BCl3 valve closed
7/7/2011	10:14:28 AM	PH3 valve closed
7/7/2011	10:14:28 AM	SiCl4 pre valve closed
7/7/2011	10:14:28 AM	SiCl4 post valve closed
7/7/2011	10:14:28 AM	Main Vac valve closed
7/7/2011	10:14:28 AM	Bubbler valve closed
7/7/2011	10:14:28 AM	Bypass valve closed
7/7/2011	10:14:28 AM	Helium MFC set to  0.000000
7/7/2011	10:14:28 AM	H2 MFC set to  0.000000
7/7/2011	10:14:28 AM	BCl3 MFC set to  0.000000
7/7/2011	10:14:28 AM	PHl3 MFC set to  0.000000
7/7/2011	10:14:28 AM	SiCl4 MFC set to  0.000000
7/7/2011	10:14:28 AM	Bypass solenoid MFC set to  760.000000
7/7/2011	10:14:28 AM	Tube furnace set to 0
7/7/2011	10:14:28 AM	Baratron reads 1021.025199 Torr.  Emergency exit.
7/7/2011	10:14:39 AM	Program exited cleanly
7/7/2011	10:14:41 AM	Program started normally
7/7/2011	10:14:41 AM	Helium valve closed
7/7/2011	10:14:41 AM	H2 valve closed
7/7/2011	10:14:41 AM	BCl3 valve closed
7/7/2011	10:14:41 AM	PH3 valve closed
7/7/2011	10:14:41 AM	SiCl4 pre valve closed
7/7/2011	10:14:41 AM	SiCl4 post valve closed
7/7/2011	10:14:41 AM	Main Vac valve closed
7/7/2011	10:14:41 AM	Bypass valve closed
7/7/2011	10:14:41 AM	Bubbler valve closed
7/7/2011	10:14:41 AM	Helium MFC set to  0.000000
7/7/2011	10:14:41 AM	H2 MFC set to  0.000000
7/7/2011	10:14:41 AM	BCl3 MFC set to  0.000000
7/7/2011	10:14:41 AM	PHl3 MFC set to  0.000000
7/7/2011	10:14:41 AM	SiCl4 MFC set to  0.000000
7/7/2011	10:14:41 AM	Bypass solenoid MFC set to  760.000000
7/7/2011	10:14:41 AM	Tube furnace set to 0
7/7/2011	10:14:42 AM	Helium valve closed
7/7/2011	10:14:42 AM	H2 valve closed
7/7/2011	10:14:42 AM	BCl3 valve closed
7/7/2011	10:14:42 AM	PH3 valve closed
7/7/2011	10:14:42 AM	SiCl4 pre valve closed
7/7/2011	10:14:42 AM	SiCl4 post valve closed
7/7/2011	10:14:42 AM	Main Vac valve closed
7/7/2011	10:14:42 AM	Bubbler valve closed
7/7/2011	10:14:42 AM	Bypass valve closed
7/7/2011	10:14:42 AM	Helium MFC set to  0.000000
7/7/2011	10:14:42 AM	H2 MFC set to  0.000000
7/7/2011	10:14:42 AM	BCl3 MFC set to  0.000000
7/7/2011	10:14:42 AM	PHl3 MFC set to  0.000000
7/7/2011	10:14:42 AM	SiCl4 MFC set to  0.000000
7/7/2011	10:14:42 AM	Bypass solenoid MFC set to  760.000000
7/7/2011	10:14:42 AM	Tube furnace set to 0
7/7/2011	10:14:42 AM	Baratron reads 1053.691695 Torr.  Emergency exit.
7/7/2011	10:14:44 AM	Program exited cleanly
7/7/2011	10:14:49 AM	Program started normally
7/7/2011	10:14:49 AM	Helium valve closed
7/7/2011	10:14:49 AM	H2 valve closed
7/7/2011	10:14:49 AM	BCl3 valve closed
7/7/2011	10:14:49 AM	PH3 valve closed
7/7/2011	10:14:49 AM	SiCl4 pre valve closed
7/7/2011	10:14:49 AM	SiCl4 post valve closed
7/7/2011	10:14:49 AM	Main Vac valve closed
7/7/2011	10:14:49 AM	Bypass valve closed
7/7/2011	10:14:49 AM	Bubbler valve closed
7/7/2011	10:14:49 AM	Helium MFC set to  0.000000
7/7/2011	10:14:49 AM	H2 MFC set to  0.000000
7/7/2011	10:14:49 AM	BCl3 MFC set to  0.000000
7/7/2011	10:14:49 AM	PHl3 MFC set to  0.000000
7/7/2011	10:14:49 AM	SiCl4 MFC set to  0.000000
7/7/2011	10:14:49 AM	Bypass solenoid MFC set to  760.000000
7/7/2011	10:14:50 AM	Tube furnace set to 0
7/7/2011	10:14:50 AM	Bypass valve opened
7/7/2011	10:16:09 AM	Bypass valve closed
7/7/2011	10:16:47 AM	Helium MFC set to  500.000000
7/7/2011	10:16:49 AM	Helium valve opened
7/7/2011	10:16:53 AM	SiCl4 MFC set to  100.000000
7/7/2011	10:16:54 AM	SiCl4 pre valve opened
7/7/2011	10:17:08 AM	SiCl4 post valve opened
7/7/2011	10:17:33 AM	Bypass valve opened
7/7/2011	10:22:13 AM	Bypass valve closed
7/7/2011	10:22:15 AM	Main Vac valve opened
7/7/2011	10:27:35 AM	Helium valve closed
7/7/2011	10:27:36 AM	SiCl4 pre valve closed
7/7/2011	10:27:37 AM	SiCl4 post valve closed
7/7/2011	10:27:51 AM	SiCl4 post valve opened
7/7/2011	10:28:02 AM	SiCl4 pre valve opened
7/7/2011	10:28:06 AM	Helium valve opened
7/7/2011	10:29:05 AM	Helium valve closed
7/7/2011	10:29:15 AM	Helium valve opened
7/7/2011	10:35:37 AM	SiCl4 post valve closed
7/7/2011	10:35:37 AM	SiCl4 pre valve closed
7/7/2011	10:35:38 AM	Helium valve closed
7/7/2011	10:35:40 AM	Main Vac valve closed
7/7/2011	10:36:01 AM	Helium valve opened
7/7/2011	10:36:03 AM	SiCl4 pre valve opened
7/7/2011	10:36:06 AM	SiCl4 post valve opened
7/7/2011	10:36:09 AM	Bypass valve opened
7/7/2011	10:51:14 AM	Bypass valve closed
7/7/2011	10:51:15 AM	Main Vac valve opened
7/7/2011	10:59:20 AM	Helium valve closed
7/7/2011	10:59:20 AM	SiCl4 post valve closed
7/7/2011	10:59:21 AM	SiCl4 pre valve closed
7/7/2011	10:59:23 AM	Main Vac valve closed
7/7/2011	10:59:36 AM	Helium valve opened
7/7/2011	10:59:37 AM	SiCl4 pre valve opened
7/7/2011	10:59:38 AM	SiCl4 post valve opened
7/7/2011	10:59:52 AM	Bypass valve opened
7/7/2011	11:04:49 AM	Bypass valve closed
7/7/2011	11:04:50 AM	Main Vac valve opened
7/7/2011	11:11:06 AM	Helium valve closed
7/7/2011	11:11:06 AM	SiCl4 pre valve closed
7/7/2011	11:11:08 AM	SiCl4 post valve closed
7/7/2011	11:11:13 AM	Main Vac valve closed
7/7/2011	11:11:25 AM	Helium valve opened
7/7/2011	11:11:27 AM	SiCl4 pre valve opened
7/7/2011	11:11:30 AM	SiCl4 post valve opened
7/7/2011	11:11:41 AM	Bypass valve opened
7/7/2011	11:15:58 AM	Bypass valve closed
7/7/2011	11:15:59 AM	Main Vac valve opened
7/7/2011	11:23:47 AM	Helium valve closed
7/7/2011	11:23:48 AM	SiCl4 pre valve closed
7/7/2011	11:23:48 AM	SiCl4 post valve closed
7/7/2011	11:23:49 AM	Main Vac valve closed
7/7/2011	11:24:05 AM	Helium valve opened
7/7/2011	11:24:06 AM	SiCl4 pre valve opened
7/7/2011	11:24:07 AM	SiCl4 post valve opened
7/7/2011	11:24:13 AM	Bypass valve opened
7/7/2011	11:28:26 AM	Bypass valve closed
7/7/2011	11:28:27 AM	Main Vac valve opened
7/7/2011	11:42:40 AM	Helium valve closed
7/7/2011	11:42:41 AM	SiCl4 pre valve closed
7/7/2011	11:42:41 AM	SiCl4 post valve closed
7/7/2011	11:42:53 AM	Helium MFC set to  0.000000
7/7/2011	11:42:58 AM	SiCl4 MFC set to  0.000000
7/7/2011	12:39:31 PM	Main Vac valve closed
7/7/2011	12:39:33 PM	SiCl4 post valve opened
7/7/2011	12:39:42 PM	Main Vac valve opened
7/7/2011	12:44:01 PM	Main Vac valve closed
7/7/2011	12:44:07 PM	Main Vac valve opened
7/7/2011	12:46:59 PM	Helium MFC set to  200.000000
7/7/2011	12:47:10 PM	Main Vac valve closed
7/7/2011	12:47:12 PM	Helium valve opened
7/7/2011	12:49:46 PM	Helium valve closed
7/7/2011	12:49:51 PM	Bypass valve opened
7/7/2011	12:50:53 PM	Bypass valve closed
7/7/2011	12:50:54 PM	Main Vac valve opened
7/7/2011	12:53:05 PM	SiCl4 post valve closed
7/7/2011	12:53:24 PM	Main Vac valve closed
7/7/2011	12:53:32 PM	Main Vac valve opened
7/7/2011	12:55:11 PM	Main Vac valve closed
7/7/2011	12:55:25 PM	Main Vac valve opened
7/7/2011	1:00:03 PM	Main Vac valve closed
7/7/2011	1:05:24 PM	Bypass valve opened
7/7/2011	1:06:31 PM	Bypass valve closed
7/7/2011	1:06:31 PM	Main Vac valve opened
7/7/2011	1:24:09 PM	Main Vac valve closed
7/7/2011	1:24:15 PM	Main Vac valve opened
7/7/2011	1:29:29 PM	Main Vac valve closed
7/7/2011	1:29:36 PM	Main Vac valve opened
7/7/2011	1:31:43 PM	Main Vac valve closed
7/7/2011	1:37:22 PM	Bypass valve opened
7/7/2011	1:37:28 PM	Bypass valve closed
7/7/2011	1:38:42 PM	Bypass valve opened
7/7/2011	1:40:04 PM	Bypass valve closed
7/7/2011	1:40:05 PM	Main Vac valve opened
7/7/2011	1:43:51 PM	Main Vac valve closed
7/7/2011	1:53:42 PM	Bypass valve opened
7/7/2011	1:54:49 PM	Bypass valve closed
7/7/2011	1:54:50 PM	Main Vac valve opened
7/7/2011	2:19:42 PM	Main Vac valve closed
7/7/2011	2:19:51 PM	Main Vac valve opened
7/7/2011	2:20:35 PM	Main Vac valve closed
7/7/2011	2:27:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	2:27:46 PM	Recipe started at 2:27 PM
7/7/2011	2:27:46 PM	Helium valve closed
7/7/2011	2:27:46 PM	H2 valve closed
7/7/2011	2:27:46 PM	BCl3 valve closed
7/7/2011	2:27:46 PM	PH3 valve closed
7/7/2011	2:27:46 PM	SiCl4 pre valve closed
7/7/2011	2:27:46 PM	SiCl4 post valve closed
7/7/2011	2:27:46 PM	Main Vac valve closed
7/7/2011	2:27:46 PM	Bubbler valve closed
7/7/2011	2:27:47 PM	Bypass valve opened
7/7/2011	2:27:47 PM	Helium MFC set to  0.000000
7/7/2011	2:27:47 PM	H2 MFC set to  0.000000
7/7/2011	2:27:47 PM	BCl3 MFC set to  0.000000
7/7/2011	2:27:47 PM	PHl3 MFC set to  0.000000
7/7/2011	2:27:47 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:27:47 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:27:47 PM	Tube furnace set to 0
7/7/2011	2:29:54 PM	Helium valve closed
7/7/2011	2:29:54 PM	H2 valve closed
7/7/2011	2:29:54 PM	BCl3 valve closed
7/7/2011	2:29:54 PM	PH3 valve closed
7/7/2011	2:29:54 PM	SiCl4 pre valve closed
7/7/2011	2:29:54 PM	SiCl4 post valve closed
7/7/2011	2:29:54 PM	Main Vac valve closed
7/7/2011	2:29:54 PM	Bubbler valve closed
7/7/2011	2:29:54 PM	Bypass valve opened
7/7/2011	2:29:54 PM	Helium MFC set to  0.000000
7/7/2011	2:29:54 PM	H2 MFC set to  0.000000
7/7/2011	2:29:54 PM	BCl3 MFC set to  0.000000
7/7/2011	2:29:54 PM	PHl3 MFC set to  0.000000
7/7/2011	2:29:54 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:29:54 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:29:54 PM	Tube furnace set to 0
7/7/2011	2:30:54 PM	Helium valve closed
7/7/2011	2:30:54 PM	H2 valve closed
7/7/2011	2:30:54 PM	BCl3 valve closed
7/7/2011	2:30:54 PM	PH3 valve closed
7/7/2011	2:30:54 PM	SiCl4 pre valve closed
7/7/2011	2:30:54 PM	SiCl4 post valve closed
7/7/2011	2:30:54 PM	Bypass valve closed
7/7/2011	2:30:54 PM	Bubbler valve closed
7/7/2011	2:30:54 PM	Main Vac valve opened
7/7/2011	2:30:54 PM	Helium MFC set to  0.000000
7/7/2011	2:30:54 PM	H2 MFC set to  0.000000
7/7/2011	2:30:54 PM	BCl3 MFC set to  0.000000
7/7/2011	2:30:54 PM	PHl3 MFC set to  0.000000
7/7/2011	2:30:54 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:30:54 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:30:54 PM	Tube furnace set to 0
7/7/2011	2:30:55 PM	Run finished at 2:30 PM
7/7/2011	2:30:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	2:50:34 PM	Main Vac valve closed
7/7/2011	2:51:02 PM	Main Vac valve opened
7/7/2011	2:51:46 PM	Main Vac valve closed
7/7/2011	2:52:11 PM	Main Vac valve opened
7/7/2011	2:54:16 PM	Main Vac valve closed
7/7/2011	2:54:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2011	2:54:32 PM	Recipe started at 2:54 PM
7/7/2011	2:54:32 PM	H2 valve closed
7/7/2011	2:54:32 PM	BCl3 valve closed
7/7/2011	2:54:32 PM	PH3 valve closed
7/7/2011	2:54:32 PM	SiCl4 pre valve closed
7/7/2011	2:54:32 PM	SiCl4 post valve closed
7/7/2011	2:54:32 PM	Main Vac valve closed
7/7/2011	2:54:32 PM	Bypass valve closed
7/7/2011	2:54:32 PM	Bubbler valve closed
7/7/2011	2:54:32 PM	Helium valve opened
7/7/2011	2:54:32 PM	Helium MFC set to  500.000000
7/7/2011	2:54:32 PM	H2 MFC set to  0.000000
7/7/2011	2:54:32 PM	BCl3 MFC set to  0.000000
7/7/2011	2:54:32 PM	PHl3 MFC set to  0.000000
7/7/2011	2:54:32 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:54:32 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:54:33 PM	Tube furnace set to 0
7/7/2011	2:55:50 PM	Helium valve closed
7/7/2011	2:55:50 PM	H2 valve closed
7/7/2011	2:55:50 PM	BCl3 valve closed
7/7/2011	2:55:50 PM	PH3 valve closed
7/7/2011	2:55:50 PM	SiCl4 pre valve closed
7/7/2011	2:55:50 PM	SiCl4 post valve closed
7/7/2011	2:55:50 PM	Main Vac valve closed
7/7/2011	2:55:50 PM	Bypass valve closed
7/7/2011	2:55:50 PM	Bubbler valve closed
7/7/2011	2:55:50 PM	Helium MFC set to  0.000000
7/7/2011	2:55:50 PM	H2 MFC set to  0.000000
7/7/2011	2:55:50 PM	BCl3 MFC set to  0.000000
7/7/2011	2:55:50 PM	PHl3 MFC set to  0.000000
7/7/2011	2:55:50 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:55:50 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:55:50 PM	Tube furnace set to 0
7/7/2011	2:55:51 PM	Run finished at 2:55 PM
7/7/2011	2:55:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/7/2011	2:57:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	2:57:04 PM	Recipe started at 2:57 PM
7/7/2011	2:57:04 PM	Helium valve closed
7/7/2011	2:57:04 PM	H2 valve closed
7/7/2011	2:57:04 PM	BCl3 valve closed
7/7/2011	2:57:04 PM	PH3 valve closed
7/7/2011	2:57:04 PM	SiCl4 pre valve closed
7/7/2011	2:57:04 PM	SiCl4 post valve closed
7/7/2011	2:57:04 PM	Main Vac valve closed
7/7/2011	2:57:04 PM	Bubbler valve closed
7/7/2011	2:57:04 PM	Bypass valve opened
7/7/2011	2:57:04 PM	Helium MFC set to  0.000000
7/7/2011	2:57:04 PM	H2 MFC set to  0.000000
7/7/2011	2:57:04 PM	BCl3 MFC set to  0.000000
7/7/2011	2:57:04 PM	PHl3 MFC set to  0.000000
7/7/2011	2:57:04 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:57:04 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:57:04 PM	Tube furnace set to 0
7/7/2011	2:57:41 PM	Helium valve closed
7/7/2011	2:57:41 PM	H2 valve closed
7/7/2011	2:57:41 PM	BCl3 valve closed
7/7/2011	2:57:41 PM	PH3 valve closed
7/7/2011	2:57:41 PM	SiCl4 pre valve closed
7/7/2011	2:57:41 PM	SiCl4 post valve closed
7/7/2011	2:57:41 PM	Main Vac valve closed
7/7/2011	2:57:41 PM	Bubbler valve closed
7/7/2011	2:57:41 PM	Bypass valve opened
7/7/2011	2:57:41 PM	Helium MFC set to  0.000000
7/7/2011	2:57:41 PM	H2 MFC set to  0.000000
7/7/2011	2:57:41 PM	BCl3 MFC set to  0.000000
7/7/2011	2:57:41 PM	PHl3 MFC set to  0.000000
7/7/2011	2:57:41 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:57:41 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:57:42 PM	Tube furnace set to 0
7/7/2011	2:58:32 PM	Helium valve closed
7/7/2011	2:58:32 PM	H2 valve closed
7/7/2011	2:58:32 PM	BCl3 valve closed
7/7/2011	2:58:32 PM	PH3 valve closed
7/7/2011	2:58:32 PM	SiCl4 pre valve closed
7/7/2011	2:58:32 PM	SiCl4 post valve closed
7/7/2011	2:58:32 PM	Bypass valve closed
7/7/2011	2:58:32 PM	Bubbler valve closed
7/7/2011	2:58:32 PM	Main Vac valve opened
7/7/2011	2:58:32 PM	Helium MFC set to  0.000000
7/7/2011	2:58:32 PM	H2 MFC set to  0.000000
7/7/2011	2:58:32 PM	BCl3 MFC set to  0.000000
7/7/2011	2:58:32 PM	PHl3 MFC set to  0.000000
7/7/2011	2:58:32 PM	SiCl4 MFC set to  0.000000
7/7/2011	2:58:32 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	2:58:32 PM	Tube furnace set to 0
7/7/2011	2:58:33 PM	Run finished at 2:58 PM
7/7/2011	2:58:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	2:59:22 PM	Main Vac valve closed
7/7/2011	3:01:06 PM	Main Vac valve opened
7/7/2011	3:01:44 PM	Main Vac valve closed
7/7/2011	3:03:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	3:03:11 PM	Recipe started at 3:03 PM
7/7/2011	3:03:12 PM	Helium valve closed
7/7/2011	3:03:12 PM	H2 valve closed
7/7/2011	3:03:12 PM	BCl3 valve closed
7/7/2011	3:03:12 PM	PH3 valve closed
7/7/2011	3:03:12 PM	SiCl4 pre valve closed
7/7/2011	3:03:12 PM	SiCl4 post valve closed
7/7/2011	3:03:12 PM	Main Vac valve closed
7/7/2011	3:03:12 PM	Bubbler valve closed
7/7/2011	3:03:12 PM	Bypass valve opened
7/7/2011	3:03:12 PM	Helium MFC set to  0.000000
7/7/2011	3:03:12 PM	H2 MFC set to  0.000000
7/7/2011	3:03:12 PM	BCl3 MFC set to  0.000000
7/7/2011	3:03:12 PM	PHl3 MFC set to  0.000000
7/7/2011	3:03:12 PM	SiCl4 MFC set to  0.000000
7/7/2011	3:03:12 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	3:03:12 PM	Tube furnace set to 0
7/7/2011	3:04:01 PM	Helium valve closed
7/7/2011	3:04:01 PM	H2 valve closed
7/7/2011	3:04:01 PM	BCl3 valve closed
7/7/2011	3:04:01 PM	PH3 valve closed
7/7/2011	3:04:01 PM	SiCl4 pre valve closed
7/7/2011	3:04:01 PM	SiCl4 post valve closed
7/7/2011	3:04:01 PM	Main Vac valve closed
7/7/2011	3:04:01 PM	Bubbler valve closed
7/7/2011	3:04:01 PM	Bypass valve opened
7/7/2011	3:04:01 PM	Helium MFC set to  0.000000
7/7/2011	3:04:01 PM	H2 MFC set to  0.000000
7/7/2011	3:04:01 PM	BCl3 MFC set to  0.000000
7/7/2011	3:04:01 PM	PHl3 MFC set to  0.000000
7/7/2011	3:04:01 PM	SiCl4 MFC set to  0.000000
7/7/2011	3:04:01 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	3:04:01 PM	Tube furnace set to 0
7/7/2011	3:04:02 PM	Helium valve closed
7/7/2011	3:04:02 PM	H2 valve closed
7/7/2011	3:04:02 PM	BCl3 valve closed
7/7/2011	3:04:02 PM	PH3 valve closed
7/7/2011	3:04:02 PM	SiCl4 pre valve closed
7/7/2011	3:04:02 PM	SiCl4 post valve closed
7/7/2011	3:04:02 PM	Bypass valve closed
7/7/2011	3:04:02 PM	Bubbler valve closed
7/7/2011	3:04:02 PM	Main Vac valve opened
7/7/2011	3:04:02 PM	Helium MFC set to  0.000000
7/7/2011	3:04:02 PM	H2 MFC set to  0.000000
7/7/2011	3:04:02 PM	BCl3 MFC set to  0.000000
7/7/2011	3:04:02 PM	PHl3 MFC set to  0.000000
7/7/2011	3:04:02 PM	SiCl4 MFC set to  0.000000
7/7/2011	3:04:02 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	3:04:02 PM	Tube furnace set to 0
7/7/2011	3:04:03 PM	Run finished at 3:04 PM
7/7/2011	3:04:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	3:04:55 PM	Main Vac valve closed
7/7/2011	3:05:49 PM	Main Vac valve opened
7/7/2011	3:08:47 PM	Main Vac valve closed
7/7/2011	3:15:11 PM	Main Vac valve opened
7/7/2011	3:15:16 PM	Main Vac valve closed
7/7/2011	3:15:21 PM	Main Vac valve opened
7/7/2011	3:17:16 PM	Main Vac valve closed
7/7/2011	3:19:26 PM	Main Vac valve opened
7/7/2011	3:40:12 PM	Main Vac valve closed
7/7/2011	3:40:24 PM	Main Vac valve opened
7/7/2011	3:40:34 PM	Main Vac valve closed
7/7/2011	3:47:03 PM	Bypass valve opened
7/7/2011	3:47:55 PM	Bypass valve closed
7/7/2011	3:51:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	3:51:03 PM	Recipe started at 3:51 PM
7/7/2011	3:51:03 PM	Helium valve closed
7/7/2011	3:51:03 PM	H2 valve closed
7/7/2011	3:51:03 PM	BCl3 valve closed
7/7/2011	3:51:03 PM	PH3 valve closed
7/7/2011	3:51:03 PM	SiCl4 pre valve closed
7/7/2011	3:51:03 PM	SiCl4 post valve closed
7/7/2011	3:51:03 PM	Main Vac valve closed
7/7/2011	3:51:03 PM	Bubbler valve closed
7/7/2011	3:51:03 PM	Bypass valve opened
7/7/2011	3:51:03 PM	Helium MFC set to  0.000000
7/7/2011	3:51:03 PM	H2 MFC set to  0.000000
7/7/2011	3:51:03 PM	BCl3 MFC set to  0.000000
7/7/2011	3:51:03 PM	PHl3 MFC set to  0.000000
7/7/2011	3:51:03 PM	SiCl4 MFC set to  0.000000
7/7/2011	3:51:03 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	3:51:03 PM	Tube furnace set to 0
7/7/2011	3:52:01 PM	Helium valve closed
7/7/2011	3:52:01 PM	H2 valve closed
7/7/2011	3:52:01 PM	BCl3 valve closed
7/7/2011	3:52:01 PM	PH3 valve closed
7/7/2011	3:52:01 PM	SiCl4 pre valve closed
7/7/2011	3:52:01 PM	SiCl4 post valve closed
7/7/2011	3:52:01 PM	Main Vac valve closed
7/7/2011	3:52:01 PM	Bubbler valve closed
7/7/2011	3:52:01 PM	Bypass valve opened
7/7/2011	3:52:01 PM	Helium MFC set to  0.000000
7/7/2011	3:52:01 PM	H2 MFC set to  0.000000
7/7/2011	3:52:01 PM	BCl3 MFC set to  0.000000
7/7/2011	3:52:01 PM	PHl3 MFC set to  0.000000
7/7/2011	3:52:01 PM	SiCl4 MFC set to  0.000000
7/7/2011	3:52:01 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	3:52:01 PM	Tube furnace set to 0
7/7/2011	3:52:02 PM	Helium valve closed
7/7/2011	3:52:02 PM	H2 valve closed
7/7/2011	3:52:02 PM	BCl3 valve closed
7/7/2011	3:52:02 PM	PH3 valve closed
7/7/2011	3:52:02 PM	SiCl4 pre valve closed
7/7/2011	3:52:02 PM	SiCl4 post valve closed
7/7/2011	3:52:02 PM	Bypass valve closed
7/7/2011	3:52:02 PM	Bubbler valve closed
7/7/2011	3:52:02 PM	Main Vac valve opened
7/7/2011	3:52:02 PM	Helium MFC set to  0.000000
7/7/2011	3:52:02 PM	H2 MFC set to  0.000000
7/7/2011	3:52:02 PM	BCl3 MFC set to  0.000000
7/7/2011	3:52:02 PM	PHl3 MFC set to  0.000000
7/7/2011	3:52:02 PM	SiCl4 MFC set to  0.000000
7/7/2011	3:52:02 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	3:52:02 PM	Tube furnace set to 0
7/7/2011	3:52:03 PM	Run finished at 3:52 PM
7/7/2011	3:52:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	3:55:09 PM	Main Vac valve closed
7/7/2011	3:55:16 PM	Main Vac valve opened
7/7/2011	3:55:32 PM	Main Vac valve closed
7/7/2011	4:03:33 PM	Bypass valve opened
7/7/2011	4:08:39 PM	Bypass valve closed
7/7/2011	4:46:22 PM	Bypass valve opened
7/7/2011	4:47:20 PM	Bypass valve closed
7/7/2011	4:47:21 PM	Main Vac valve opened
7/7/2011	4:49:20 PM	Main Vac valve closed
7/7/2011	4:49:28 PM	Main Vac valve opened
7/7/2011	4:57:09 PM	Main Vac valve closed
7/7/2011	4:57:21 PM	Main Vac valve opened
7/7/2011	5:01:08 PM	Main Vac valve closed
7/7/2011	5:01:28 PM	Main Vac valve opened
7/7/2011	5:06:39 PM	Main Vac valve closed
7/7/2011	5:06:45 PM	Main Vac valve opened
7/7/2011	5:07:34 PM	SiCl4 post valve opened
7/7/2011	5:07:51 PM	SiCl4 post valve closed
7/7/2011	5:20:14 PM	Main Vac valve closed
7/7/2011	5:20:50 PM	Bypass valve opened
7/7/2011	5:25:01 PM	Bypass valve closed
7/7/2011	5:56:23 PM	Bypass valve opened
7/7/2011	5:57:02 PM	Bypass valve closed
7/7/2011	5:57:02 PM	Main Vac valve opened
7/7/2011	6:16:48 PM	Main Vac valve closed
7/7/2011	6:16:58 PM	Main Vac valve opened
7/7/2011	6:17:29 PM	Main Vac valve closed
7/7/2011	6:17:49 PM	Main Vac valve opened
7/7/2011	6:23:44 PM	Main Vac valve closed
7/7/2011	6:26:15 PM	Main Vac valve opened
7/7/2011	6:34:53 PM	Main Vac valve closed
7/7/2011	6:35:27 PM	Program started after a nonstandard shutdown
7/7/2011	6:35:27 PM	Helium valve closed
7/7/2011	6:35:27 PM	H2 valve closed
7/7/2011	6:35:27 PM	BCl3 valve closed
7/7/2011	6:35:27 PM	PH3 valve closed
7/7/2011	6:35:27 PM	SiCl4 pre valve closed
7/7/2011	6:35:27 PM	SiCl4 post valve closed
7/7/2011	6:35:27 PM	Main Vac valve closed
7/7/2011	6:35:27 PM	Bypass valve closed
7/7/2011	6:35:27 PM	Bubbler valve closed
7/7/2011	6:35:27 PM	Helium MFC set to  0.000000
7/7/2011	6:35:27 PM	H2 MFC set to  0.000000
7/7/2011	6:35:27 PM	BCl3 MFC set to  0.000000
7/7/2011	6:35:27 PM	PHl3 MFC set to  0.000000
7/7/2011	6:35:27 PM	SiCl4 MFC set to  0.000000
7/7/2011	6:35:27 PM	Bypass solenoid MFC set to  760.000000
7/7/2011	6:35:27 PM	Tube furnace set to 0
7/7/2011	6:35:39 PM	Bubbler valve opened
7/7/2011	6:35:47 PM	Bubbler valve closed
7/7/2011	6:35:48 PM	Bubbler valve opened
7/7/2011	6:35:50 PM	Bubbler valve closed
7/7/2011	6:35:51 PM	Bubbler valve opened
7/7/2011	6:35:52 PM	Bubbler valve closed
7/7/2011	6:36:17 PM	Bypass valve opened
7/7/2011	6:36:55 PM	Bypass valve closed
7/7/2011	6:36:56 PM	Main Vac valve opened
7/7/2011	6:37:49 PM	Main Vac valve closed
7/7/2011	6:37:57 PM	Main Vac valve opened
7/7/2011	6:42:35 PM	Main Vac valve closed
7/7/2011	6:42:44 PM	Main Vac valve opened
7/7/2011	6:43:25 PM	Main Vac valve closed
7/7/2011	6:43:33 PM	Bubbler valve opened
7/7/2011	6:43:35 PM	Bubbler valve closed
7/7/2011	6:43:48 PM	Bypass valve opened
7/7/2011	6:44:01 PM	Bypass valve closed
7/7/2011	6:44:01 PM	Main Vac valve opened
7/7/2011	6:44:24 PM	Main Vac valve closed
7/7/2011	6:44:35 PM	Main Vac valve opened
7/7/2011	6:45:03 PM	Main Vac valve closed
7/7/2011	6:45:10 PM	Main Vac valve opened
7/7/2011	6:48:12 PM	Main Vac valve closed
7/7/2011	6:52:03 PM	Bubbler valve opened
7/7/2011	6:52:04 PM	Bubbler valve closed
7/7/2011	6:54:45 PM	Bypass valve opened
7/7/2011	6:56:47 PM	Bypass valve closed
7/7/2011	7:14:32 PM	Bypass valve opened
7/7/2011	7:15:16 PM	Bypass valve closed
7/7/2011	7:15:17 PM	Main Vac valve opened
7/7/2011	7:20:19 PM	Main Vac valve closed
7/7/2011	7:20:27 PM	Main Vac valve opened
7/7/2011	7:39:33 PM	Main Vac valve closed
7/7/2011	7:47:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	7:47:15 PM	Recipe started at 7:47 PM
7/7/2011	7:47:15 PM	Helium valve closed
7/7/2011	7:47:15 PM	H2 valve closed
7/7/2011	7:47:15 PM	BCl3 valve closed
7/7/2011	7:47:15 PM	PH3 valve closed
7/7/2011	7:47:15 PM	SiCl4 pre valve closed
7/7/2011	7:47:15 PM	SiCl4 post valve closed
7/7/2011	7:47:15 PM	Main Vac valve closed
7/7/2011	7:47:15 PM	Bubbler valve closed
7/7/2011	7:47:15 PM	Bypass valve opened
7/7/2011	7:47:15 PM	Helium MFC set to  0.000000
7/7/2011	7:47:15 PM	H2 MFC set to  0.000000
7/7/2011	7:47:15 PM	BCl3 MFC set to  0.000000
7/7/2011	7:47:15 PM	PHl3 MFC set to  0.000000
7/7/2011	7:47:15 PM	SiCl4 MFC set to  0.000000
7/7/2011	7:47:15 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	7:47:15 PM	Tube furnace set to 0
7/7/2011	7:48:12 PM	Helium valve closed
7/7/2011	7:48:12 PM	H2 valve closed
7/7/2011	7:48:12 PM	BCl3 valve closed
7/7/2011	7:48:12 PM	PH3 valve closed
7/7/2011	7:48:12 PM	SiCl4 pre valve closed
7/7/2011	7:48:12 PM	SiCl4 post valve closed
7/7/2011	7:48:12 PM	Main Vac valve closed
7/7/2011	7:48:12 PM	Bubbler valve closed
7/7/2011	7:48:12 PM	Bypass valve opened
7/7/2011	7:48:12 PM	Helium MFC set to  0.000000
7/7/2011	7:48:12 PM	H2 MFC set to  0.000000
7/7/2011	7:48:12 PM	BCl3 MFC set to  0.000000
7/7/2011	7:48:12 PM	PHl3 MFC set to  0.000000
7/7/2011	7:48:12 PM	SiCl4 MFC set to  0.000000
7/7/2011	7:48:12 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	7:48:13 PM	Tube furnace set to 0
7/7/2011	7:48:40 PM	Helium valve closed
7/7/2011	7:48:40 PM	H2 valve closed
7/7/2011	7:48:40 PM	BCl3 valve closed
7/7/2011	7:48:40 PM	PH3 valve closed
7/7/2011	7:48:40 PM	SiCl4 pre valve closed
7/7/2011	7:48:40 PM	SiCl4 post valve closed
7/7/2011	7:48:40 PM	Bypass valve closed
7/7/2011	7:48:40 PM	Bubbler valve closed
7/7/2011	7:48:40 PM	Main Vac valve opened
7/7/2011	7:48:40 PM	Helium MFC set to  0.000000
7/7/2011	7:48:40 PM	H2 MFC set to  0.000000
7/7/2011	7:48:40 PM	BCl3 MFC set to  0.000000
7/7/2011	7:48:40 PM	PHl3 MFC set to  0.000000
7/7/2011	7:48:40 PM	SiCl4 MFC set to  0.000000
7/7/2011	7:48:40 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	7:48:40 PM	Tube furnace set to 0
7/7/2011	7:48:41 PM	Run finished at 7:48 PM
7/7/2011	7:48:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	7:52:44 PM	Main Vac valve closed
7/7/2011	7:52:54 PM	Main Vac valve opened
7/7/2011	7:53:30 PM	Main Vac valve closed
7/7/2011	8:02:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	8:02:02 PM	Recipe started at 8:02 PM
7/7/2011	8:02:02 PM	Helium valve closed
7/7/2011	8:02:02 PM	H2 valve closed
7/7/2011	8:02:02 PM	BCl3 valve closed
7/7/2011	8:02:02 PM	PH3 valve closed
7/7/2011	8:02:02 PM	SiCl4 pre valve closed
7/7/2011	8:02:02 PM	SiCl4 post valve closed
7/7/2011	8:02:02 PM	Main Vac valve closed
7/7/2011	8:02:02 PM	Bubbler valve closed
7/7/2011	8:02:02 PM	Bypass valve opened
7/7/2011	8:02:02 PM	Helium MFC set to  0.000000
7/7/2011	8:02:02 PM	H2 MFC set to  0.000000
7/7/2011	8:02:02 PM	BCl3 MFC set to  0.000000
7/7/2011	8:02:02 PM	PHl3 MFC set to  0.000000
7/7/2011	8:02:02 PM	SiCl4 MFC set to  0.000000
7/7/2011	8:02:02 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	8:02:02 PM	Tube furnace set to 0
7/7/2011	8:03:15 PM	Run aborted at 8:03 PM
7/7/2011	8:03:15 PM	Helium valve closed
7/7/2011	8:03:15 PM	H2 valve closed
7/7/2011	8:03:15 PM	BCl3 valve closed
7/7/2011	8:03:15 PM	PH3 valve closed
7/7/2011	8:03:15 PM	SiCl4 pre valve closed
7/7/2011	8:03:15 PM	SiCl4 post valve closed
7/7/2011	8:03:15 PM	Bypass valve closed
7/7/2011	8:03:15 PM	Main Vac valve closed
7/7/2011	8:03:15 PM	Bubbler valve closed
7/7/2011	8:03:15 PM	Helium MFC set to  0.000000
7/7/2011	8:03:15 PM	H2 MFC set to  0.000000
7/7/2011	8:03:15 PM	BCl3 MFC set to  0.000000
7/7/2011	8:03:15 PM	PHl3 MFC set to  0.000000
7/7/2011	8:03:15 PM	SiCl4 MFC set to  0.000000
7/7/2011	8:03:15 PM	Tube furnace set to 0
7/7/2011	8:03:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	8:04:16 PM	Bypass valve opened
7/7/2011	8:04:41 PM	Bypass valve closed
7/7/2011	8:07:39 PM	Bypass valve opened
7/7/2011	8:07:41 PM	Bypass valve closed
7/7/2011	8:10:29 PM	Bypass valve opened
7/7/2011	8:10:31 PM	Bypass valve closed
7/7/2011	8:14:13 PM	Bypass valve opened
7/7/2011	8:14:35 PM	Bypass valve closed
7/7/2011	8:16:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/7/2011	8:16:13 PM	Recipe started at 8:16 PM
7/7/2011	8:16:13 PM	Helium valve closed
7/7/2011	8:16:13 PM	H2 valve closed
7/7/2011	8:16:13 PM	BCl3 valve closed
7/7/2011	8:16:13 PM	PH3 valve closed
7/7/2011	8:16:13 PM	SiCl4 pre valve closed
7/7/2011	8:16:13 PM	SiCl4 post valve closed
7/7/2011	8:16:13 PM	Main Vac valve closed
7/7/2011	8:16:13 PM	Bubbler valve closed
7/7/2011	8:16:13 PM	Bypass valve opened
7/7/2011	8:16:13 PM	Helium MFC set to  0.000000
7/7/2011	8:16:13 PM	H2 MFC set to  0.000000
7/7/2011	8:16:13 PM	BCl3 MFC set to  0.000000
7/7/2011	8:16:13 PM	PHl3 MFC set to  0.000000
7/7/2011	8:16:13 PM	SiCl4 MFC set to  0.000000
7/7/2011	8:16:13 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	8:16:13 PM	Tube furnace set to 0
7/7/2011	8:18:00 PM	Helium valve closed
7/7/2011	8:18:00 PM	H2 valve closed
7/7/2011	8:18:00 PM	BCl3 valve closed
7/7/2011	8:18:00 PM	PH3 valve closed
7/7/2011	8:18:00 PM	SiCl4 pre valve closed
7/7/2011	8:18:00 PM	SiCl4 post valve closed
7/7/2011	8:18:00 PM	Main Vac valve closed
7/7/2011	8:18:00 PM	Bubbler valve closed
7/7/2011	8:18:00 PM	Bypass valve opened
7/7/2011	8:18:00 PM	Helium MFC set to  0.000000
7/7/2011	8:18:00 PM	H2 MFC set to  0.000000
7/7/2011	8:18:00 PM	BCl3 MFC set to  0.000000
7/7/2011	8:18:00 PM	PHl3 MFC set to  0.000000
7/7/2011	8:18:00 PM	SiCl4 MFC set to  0.000000
7/7/2011	8:18:00 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	8:18:01 PM	Tube furnace set to 0
7/7/2011	8:18:05 PM	Helium valve closed
7/7/2011	8:18:05 PM	H2 valve closed
7/7/2011	8:18:05 PM	BCl3 valve closed
7/7/2011	8:18:05 PM	PH3 valve closed
7/7/2011	8:18:05 PM	SiCl4 pre valve closed
7/7/2011	8:18:05 PM	SiCl4 post valve closed
7/7/2011	8:18:05 PM	Bypass valve closed
7/7/2011	8:18:05 PM	Bubbler valve closed
7/7/2011	8:18:05 PM	Main Vac valve opened
7/7/2011	8:18:05 PM	Helium MFC set to  0.000000
7/7/2011	8:18:05 PM	H2 MFC set to  0.000000
7/7/2011	8:18:05 PM	BCl3 MFC set to  0.000000
7/7/2011	8:18:05 PM	PHl3 MFC set to  0.000000
7/7/2011	8:18:05 PM	SiCl4 MFC set to  0.000000
7/7/2011	8:18:05 PM	Bypass solenoid MFC set to  0.000000
7/7/2011	8:18:05 PM	Tube furnace set to 0
7/7/2011	8:18:06 PM	Run finished at 8:18 PM
7/7/2011	8:18:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
